Ni-Ti-Cu alloy present different properties: shape memory effect, super-elasticity and biocompatibility which allow it to be used in different fields: from biomedical to micro electro mechanical systems. It is complex to obtain these properties in thin films of Ni-Ti-Cu alloy deposited on Si substrates. In this work preliminary results, in situ X-ray fluorescence data, ex situ X-ray diffraction data of Ni-Ti-Cu thin film will be reported. These measurements will allow to control the correct growth of the thin film alloy produced by laser deposition. (c) 2007 Elsevier B.V. All rights reserved.