Grazing emission X-ray fluorescence (GE-XRF) is a development of XRF related to total reflection XRF. This paper proposed a GE-MXRF setup involved a polycapillary X-ray lens. Polycapillary lens is an effective optics to obtain mu m-size primary X-ray beam. Using this proposed setup, we applied it to the analysis of film samples, and the information of film thickness, composition and density can be acquired, which is very useful in semiconductor industry. (c) 2007 Published by Elsevier B.V.