Journal of Crystal Growth, Vol.304, No.2, 383-387, 2007
PbTiO3 thin films grown by mixed reactive thermal co-evaporation
This paper describes the growth conditions and the structural characterization of thin films PbTiO3 elaborated by a mixed reactive thermal co-evaporation. In a same chamber, in oxygen atmosphere, the titanium source is deposited by electron beam evaporation of TiO2 and the lead source is brought by thermal evaporation of PbO. Crystallographic properties are presented using X-ray diffractometry, morphological aspects are shown by means of electronic and atomic force microscopes (MEB and AFM). The effect of post-annealing on morphology is presented. (c) 2007 Elsevier B.V. All rights reserved.
Keywords:characterization;physical vapor deposition process;titanium compounds;PbTiO3;ferroelectrics