We report one-dimensional aligned growth of InAs quantum dots (QDs) in a dielectric grating on InP (0 0 1) by metalorganic vapor phase epitaxy (MOVPE). InAs QDs were grown selectively along the edge of the SiO2 stripes to form dual chains in each period of the grating formed by laser holography method with a period of 244 nm. The linear alignment property of InAs dots was maintained in wet chemical etched SiO2 array template with 1.7 mu m openings. The InAs QDs grown in SiO2 grating template showed room temperature photoluminescence (PL) emission around 1.5 mu m, red shifted from QDs grown on plain InP substrate. The results can be applied to naturally gain coupled distributed feedback lasers and coupled QDs growth. (c) 2007 Elsevier B.V. All rights reserved.