LiFePO4 films with a thickness of 1 mu m were deposited on a stainless steel substrate by radio-frequency magnetron sputtering of a LiFePO4/carbon composite target. Raman spectra revealed the presence of carbon in the film, which increased the electronic conductivity of the film relative to reports of the carbon-free material. X-ray diffraction revealed that the films were well crystallized, free of second phases, and may have a texture with a (011) orientation. The LiFePO4 plus carbon film showed a good capacity and rate capability at 25 degrees and -20 degrees C when cycled as the cathode of a lithium battery, although the film was still inferior to the carbon-coated LiFePO4 powder electrodes with 0.5 mu m particle size. (c) 2007 The Electrochemical Society.