The influence of predeposition of homo-buffer layers on film quality and photoluminescence (PL) property was studied for SrAl2O4: Eu2+ (SAOE) film prepared by the rf magnetron method. The crystallinity and surface morphology were characterized by X-ray diffraction, atomic force microscopy, and scanning electron microscopy. After introducing a homo-buffer layer, improvements were evident in not only the crystallinity but also the surface morphology and adhesion of the film. The more important point is that the existence of the homo-buffer layer increases the PL intensity of SAOE film considerably. Furthermore, the films prepared through a two-step growth process show a high optical transmittance of approximately 80% in the visible region. These results imply that the buffer layer relaxes the strain and improves the crystallinity and adhesion of the film. (c) 2007 The Electrochemical Society.