Titanium dioxide (TiO2) film for dye-sensitized solar cells (DSSCs) has surface defects such as oxygen vacancies created during the annealing process. The authors used a plasma treatment technique to reduce defects on TiO2 surfaces. They investigated the influence of different gas plasma treatments of TiO2 film on the photoelectric performance of DSSC. Short-circuit photocurrent density (J(sc)), open-circuit photovoltage (V-oc), and the amount of adsorbed dye for DSSCs were measured. As a result, the solar-to-electricity conversion efficiencies of the O-2- and N-2-treated cells increased by 15%-20% compared to untreated cells. On the other hand, solar energy conversion efficiency of CF4-plasma treated cells decreased drastically. The increased amount of adsorbed dye on the TiO2 film was measured by time-of-flight secondary ion mass spectrometry. TiO2 surfaces modified by plasma treatment were characterized using analytical instruments such as x-ray photoelectron spectroscopy and near-edge x-ray absorption fine structure. (c) 2007 American Vacuum Society.