Homogeneous polystyrene monolayers covalently end-attached on mica and silica surfaces were obtained using a "graft to" methodology. The grafting was achieved via nucleophilic substitution between silanol groups (Si-OH) containing surface and monochlorosilyl terminated polystyrene (PS). Different parameters, such as surface activation, grafting reaction time, polymer concentration, nature of solvent, and presence of catalyst, were investigated to determine the optimal conditions for creating very homogeneous and stable polymer monolayers. Ellipsometry, atomic force microscopy (AFM), surface forces apparatus (SFA), and contact angle measurements were used to characterize the polymer-grafted layers. An efficient plasma activation procedure was established to create a maximum number of silanol groups on mica surfaces without increasing the surface roughness. Surface reactivity was investigated by grafting trimethylchlorosilane (TMS) on OH-activated mica and silica. The maximum TMS surface coverage on activated mica is similar to that observed for silica. The stability of covalently attached TMS and PS layers in toluene and water were investigated. Both grafted layers (TMS and PS) partially detached from the mica and silica surfaces when immersed in water. Hydrolysis of the siloxane bond between the monochlorosilyl groups and the surface is the most probable cause of layer degrafting. The degrafting was much slower with the long PS polymer chains, compared to the small TMS molecules, which may act as a protective layer against hydrolysis.