Solid phase technology of growing of epitaxial and textured Mg2Si films on Si(III) is developed. It includes fabrication of template layer, deposition of multiplayer sandwich structure Mg/Si/ and final annealing. Research results are presented on morphology, structure and optical properties of thin Mg2Si films grown on Si(III) by the method of solid-phase annealing on a template layer. (c) 2007 Published by Elsevier B.V.