Various alcohols, phenols, naphthols, and oximes were effectively converted into their corresponding trimethylsilyl ethers with hexamethyldisilazane in the presence of solid silica supported perchloric acid under very mild conditions at room temperature with short reaction time in good to excellent yields. The notable advantages of this protocol are: work up procedure is easy and the catalyst can be recovered by simple filtration and reused. (c) 2007 Elsevier B.V. All rights reserved.