Porous anodic alumina (PAA) film has recently attracted much attention as a key material for the fabrication of various nanostructures. In this study, a multi-step anodization and leaching process was employed to produce three-dimensional nanometer scale structured film. During the leaching process, the Porous alumina film was dipped in phosphoric acid solution for pore widening. Each anodization process was followed by this leaching process. This method produced alumina film with multi-step structure. Meanwhile, with five-step film production, the Structure showed inverted cone Structure. We produced the low aspect ratio pores of this Structure, which would be applicable for fabrications of nanomaterials. In addition, the aspect ratio was controlled by changing the anodization duration. (C) 2007 Published by Elsevier Ltd.