화학공학소재연구정보센터
Chemistry Letters, Vol.36, No.11, 1308-1309, 2007
A novel negative-working photoimaging material based on a base-amplifying silicone resin tethering phenylsulfonylethyl groups
We have developed a base-sensitive silicone resin tethering phenylsulfonylethyl units as base-amplifying groups showing high thermal stability. The resin underwent a base proliferation reaction autocatalytically to generate amino groups on its side chains, which accelerated the base-catalyzed hydrolytic condensation of residual ethoxysilyl units in its main chain. Furthermore, a film of the resin sensitized with a photobase generator provided a negative-working photoimaging material with a high sensitivity.