화학공학소재연구정보센터
Advanced Materials, Vol.19, No.21, 3570-3570, 2007
High-field scanning probe lithography in hexadecane: Transitioning from field induced oxidation to solvent decomposition through surface modification
High field scanning probe lithography in hexadecane leads to two different chemical reactions depending on surface hydrophilicity. On a hydrophilic surface, oxidation of the sample occurs; a hydrophobic surface, results in solvent decomposition and nanoscale deposition of etch resistant material. The features are characterized with photoelectron emission microscopy and are carbonaceous in nature with a highly cross-linked bonding network. Tone reversal in a fluorinated etch is achieved.