Nanoscale materials directly interfacing semiconductors is a new area of nanoscience and nanotechnology. Tremendous attention has been paid to inorganic nano size crystals in recent years because of their significant properties. Prussian blue (PB) and its analogues could play important roles in the field of molecule-based magnets, electrochromic materials, ion selectivity electrodes and biosensors. In this study, we report on fabricating Prussian blue patterns on silicon surface by combining the photolithographic techniques and galvanic displacement reaction, and the resulting patterns were characterized by scanning electron microscopy (SEM) and scanning electrochemical microscopy (SECM) on the basis of detection of catalytic current for the oxidation Of H2O2.