Effect of laser beam focusing point on AFM measurements

Younghun Kim; Young In Yang; Inhee Choi; Jongheop Yi

Korean Journal of Chemical Engineering, Vol.26, No.2, 496-499, March, 2009

DOI10.1007/s11814-009-0084-z Export Citation

Effect of laser beam focusing point on AFM measurements

Younghun Kim^†, Young In Yang¹, Inhee Choi¹, and Jongheop Yi¹

Department of Chemical Engineering, Kwangwoon University, Seoul 139-701, Korea
¹School of Chemical and Biological Engineering, Seoul National University, Seoul 151-742, Korea

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The optical beam deflection method, which is used in AFM to obtain surface images, may distort the resulting image. The flexible and long cantilever is easily overdamped by the laser radiation pressure, resulting in steady deflection of the cantilever (<1 nm). This deflective force distorts the image and influences the force-distance (F-D) curve. The present study investigated the effect of laser radiation pressure on image distortion. As a proof-of-concept test, two grating samples (with step heights of 150 and 18 nm for TGX01 and TGZ01, respectively) were examined with an NSC36 series cantilever in air and water media.

Keywords:Atomic Force Microscopy;Image Distortion;Laser Beam;Radiation Pressure

[References]

Kim Y, Kang SK, Choi I, Lee J, Yi J, Appl. Phys. Lett., 88, 173121 (2006)
Choi I, Yi J, Korean J. Chem. Eng., 25(2), 386 (2008)
Kim Y, Choi I, Kang SK, Lee J, Yi J, Appl. Phys. Lett., 86, 073113 (2005)
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Jones RE, Hart DP, Tribol. Int., 38, 335 (2005)
Sun Y, Pang JHL, Nanotechnology, 17, 933 (2006)
Pal S, Ghosh AK, Electronic Lett., 42, 580 (2006)
Dragoman D, Dragoman M, Appl. Opt., 38, 6773 (1996)
Kwon J, Honh J, Kim YS, Lee DY, Lee S, Park S, Rev. Sci. Instrum., 74, 4378 (2003)
Argento C, French RH, J. Appl. Phys., 80, 6081 (1996)
Ackler HD, French RH, Chiang YM, J. Colloid Interface Sci., 179(2), 460 (1996)
Carpick RW, Ogletree DF, Salmeron M, J. Colloid Interface Sci., 211(2), 395 (1999)

[Related Articles]

[1] Kim Y, Kang SK, Choi I, Lee J, Yi J, Appl. Phys. Lett., 88, 173121 (2006)

[2] Choi I, Yi J, Korean J. Chem. Eng., 25(2), 386 (2008)

[3] Kim Y, Choi I, Kang SK, Lee J, Yi J, Appl. Phys. Lett., 86, 073113 (2005)

[4] Kim Y, Yi J, J. Phys. Chem. B, 110(41), 20526 (2006)

[5] Hutter JL, Bechhoefer J, Rev. Sci. Instrum., 64, 1868 (1993)

[6] Jones RE, Hart DP, Tribol. Int., 38, 335 (2005)

[7] Sun Y, Pang JHL, Nanotechnology, 17, 933 (2006)

[8] Pal S, Ghosh AK, Electronic Lett., 42, 580 (2006)

[9] Dragoman D, Dragoman M, Appl. Opt., 38, 6773 (1996)

[10] Kwon J, Honh J, Kim YS, Lee DY, Lee S, Park S, Rev. Sci. Instrum., 74, 4378 (2003)

[11] Argento C, French RH, J. Appl. Phys., 80, 6081 (1996)

[12] Ackler HD, French RH, Chiang YM, J. Colloid Interface Sci., 179(2), 460 (1996)

[13] Carpick RW, Ogletree DF, Salmeron M, J. Colloid Interface Sci., 211(2), 395 (1999)