Surface penetrated polymerization of tetrafluoroethylene (TFE) was carried out on a polycarbonate (PC) plate in supercritical fluoroform (scCHF(3)). Since the high diffusiveness is one of peculiar features of supercritical fluids, TFE monomers and initiators (perfluorinated benzoyl peroxide) could penetrate into the surface of polymer substrates and be photo-polymerized. After washing physisorbed homopolymers on the surface, polytetrafluoroethylene (PTFE) was found to penetrate into 50-800 nm depth from the surface and covered the PC surface in the proportion of 85%. The surface coverage density and the penetration depth could be controlled by adjusting of the pressure of scCHF(3). The TFE-penetrated polymerization could be applied for various polymer plates such as polyethylene, polystyrene, polypropylene, poly(ethylene terephthalate), and polyimide. In addition to polymer plates, this technique could be applied to a cellulose paper, a nylon textile, and a porous PC membrane. The PTFE-penetrated nylon textile showed a high resistance for washing test with detergents, compared with the commercial fluoropolymer-sprayed nylon textile. The PTFE-penetrated porous PC membrane showed high oxygen permeability (P-O2/P-N2 = 5.2), compared with that of the untreated PC membrane (P-O2/P-N2 = 3.5) in gas permeation experiments of O-2 and N-2. (C) 2008 Wiley Periodicals, Inc.