화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.25, No.6, 2649-2653, 2007
V-groove plasmonic waveguides fabricated by nanoimprint lithography
Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.