화학공학소재연구정보센터
Polymer Engineering and Science, Vol.48, No.4, 747-755, 2008
Yield stress and rheological characterization of the low shear zone of an epoxy molding compound for encapsulation of semiconductor devices
In encapsulation molding of IC packages, the melt flow inside the cavity is generally controlled in a low shear to prevent wire sweep, and other molding defects. Therefore, it is important to evaluate the rheological properties of epoxy molding compounds (EMC) in a low shear zone including determining the yield stress. In this study, a newly specialized Parallel-Plate Plastometer for EMCs was built up. Using this plastometer, the yield stress and its temperature dependence were clarified, and the rheological properties in the low shear zone were evaluated. As a result, the rheological properties in a low shear zone of 0.1-10 s(-1) were characterized using the Herschel-Bulkley viscosity model which introduced the yield stress, the Castro-Macosko equation as a dependency model of cure, and the WLF equation as a dependency model for temperature.