화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.7, 1449-1452, 2008
The effect of deposition parameters on the properties of SrCu2O2 films fabricated by pulsed laser deposition
SrCu2O2 (SCO) thin films have been fabricated by pulsed laser deposition at oxygen partial pressures between 5 x 10(-5) - 5 x 10(-2) mbar and substrate temperatures from 300 degrees C to 500 degrees C. All films were single-phase SrCu2O2, p-type materials. Films deposited at a substrate temperature of 300 degrees C and oxygen pressure 5 x 10(-4) mbar exhibited the highest transparency (similar to 80%), having conductivity 10(-3) S/cm and carrier concentration but lower transmittance. Depositions at substrate temperatures higher than 300 degrees C gave films of high crystallinity and transmittance even for films as thick as 800 nm. The energy gap of SrCu2O2 thin films was found to be around 3.3 eV. (C) 2007 Elsevier B.V. All rights reserved.