To use solar irradiation or interior fighting efficiently, we sought a photocatalyst with high reactivity under visible light. Nitrogen and carbon doping TiO2 films were obtained by heating a TiO2 gel in an ionized N-2 gas. The as-synthesized TiO2-x-yNxCy films have shown an improvement over titanium dioxide in optical absorption and photocatalytic activity such as photodegradation of methyl orange under visible light. The process of the oxygen atom substituted by nitrogen and carbon was discussed. Oxygen vacancy induced by the formation of Ti3+ species and nitrogen and carbon doped into substitution sites of TiO2 have been proven to be indispensable for the enhance of photocatalytic activity, as assessed by UV-Vis Spectroscopy and X-ray photoemission spectroscopy. (c) 2007 Elsevier B.V. All rights reserved.