Ilmenite-type (Zn1-xCdx)TiO3 (0 <= x <= 0.15 and 0.8 <= x <= 1.0) was synthesized by a modified sol-gel route including the Pechini process via two-step heat treatments. The thermal stability of (Zn1-xCdx)TiO3 depended on the amount of cadmium content. The as-synthesized (Zn1-xCdx)TiO3 (0 <= x <= 0.15 and 0.8 <= x <= 1.0) showed higher thermal stability than that of ZnTiO3. The variation of the dielectric constant of all synthesized (Zn1-xCdx)TiO3 samples for all measurement frequencies showed a similar tendency. The dielectric constant of each (Zn1-xCdx)TiO3 sample decreased first with increasing frequencies and then increased slightly when the frequency was up to 10(7) Hz. Moreover, the dielectric loss tangent of all synthesized (Zn1-xCdx)TiO3 samples for all measurement frequencies also changed in similar patterns. The dielectric loss tangent decreased with increasing measurement frequencies. The microwave dielectric properties of (Zn1-xCdx)TiO3 were changed with the cadmium doping content in the range of microwave frequency.