Applied Surface Science, Vol.254, No.7, 1977-1980, 2008
The effect of controlled ion bombardment on the electronic structure of the Si(001) surface
We have studied the effects of controlled ion bombardment on the electronic structure of the Si(0 0 1) surface. The surface was exposed to various doses of Ar+ ions accelerated towards the surface at 500 eV. X-ray photoelectron spectroscopy (XPS) spectra of the irradiated H-terminated Si(0 0 1) surface reveal the appearance of peaks that are associated with the presence of cleaved Si bonds. Ultraviolet photoelectron spectroscopy (UPS) spectra of the irradiated Si(0 0 1)2 x 1 surface show that the dimer dangling-bond surface state decays monotonically with increasing dose. These results, coupled with previous scanning tunneling microscopy (STM) studies, indicate that the breaking of dimers, and possibly the creation of adatom-like defects, during ion irradiation are responsible for the changes in the electronic structure of the valence band for this surface. (C) 2007 Elsevier B.V. All rights reserved.
Keywords:silicon;ion bombardment;X-ray photoelectron spectroscopy;ultraviolet photoelectron spectroscopy;surface defects;surface electronic phenomena