A simple method was developed for the immobilization of reversible addition-fragmentation chain-transfer (RAFT) initiators on the silicon surface. Well-defined polymer-silicon hybrids, including the tethered brushes of glycidyl methacrylate (GMA) polymer, poly(ethylene glycol) monomethacrylate (PEGMA) polymer and block copolymer on a silicon wafer, were prepared via surface-initiated RAFT living radical polymerization. The "living'' chain ends were used as the macroinitiator for the subsequent synthesis of diblock copolymers. (C) 2007 Elsevier B. V. All rights reserved.