We investigated micron size, high-performance, and solenoid-type radio-frequency surface-mounted device (SMD) chip inductors with a low-loss Al2O3 core for a GHz drive microwave circuit application. Copper coils with a diameter of 27 mu m were used and the chip inductors fabricated in this study are 0.86 x 0.46 x 0.45 mm(3). The high-frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of the developed inductors were measured using a RF impedance/material analyzer (HP4291B with HP16193A test fixture). The developed inductors have a self-resonant frequency of 3.7-5.2 GHz and exhibit L of 15-34 nH. The inductors have Q of 38-49 over the frequency ranges of 900 MHz-1.7 GHz. The calculated data obtained from the equivalent circuit and the derived equation of Q described the high-frequency data of L, Q, and Z of the inductors developed quite well. (C) 2007 Elsevier B.V. All rights reserved.