화학공학소재연구정보센터
Journal of Crystal Growth, Vol.310, No.5, 959-965, 2008
Lattice parameters of bulk GaN fabricated by halide vapor phase epitaxy
The lattice parameters of low-defect density undoped bulk GaN fabricated by halide vapor phase epitaxy (HVPE) and removal of the substrate are precisely determined using high-resolution X-ray diffraction. The obtained values, c = 5.18523 angstrom and a = 3.18926 angstrom are compared with the lattice parameters of free-standing HVPE-GaN from different sources and found to be representative for state-of-the-art undoped HVPE bulk GaN material. A comparison with bulk GaN fabricated by the high pressure technique and homoepitaxial GaN layer is made, and the observed differences are discussed in terms of their free-electron concentrations, point and structural defects. (C) 2007 Elsevier B.V. All rights reserved.