Mn-doped and undoped ZnO nanocrystalline thin films were synthesized by the sol gel method using a spin-coating technique. The microstructure, morphology and optical properties of ZnO films were studied. The films that were dried at 623 K and then annealed at 873 K show hexagonal wurtzite structure, and presence of few manganese oxide peaks have also been observed from the XRD pattern. Two emission bands have been observed from CL spectrum. Mn-doped film showed shift in the near-band edge ultraviolet emission peak and also defect level emission peak in the visible range. Also SEM images of the films showed microstructure consisting of many spherical shaped nanoparticles and nanorods with wrinkle network. AFM image reflects the same structure observed in SEM and the surface roughness has been found for Mn-doped film. (c) 2007 Published by Elsevier B.V.