Advanced Materials, Vol.20, No.10, 1898-1898, 2008
Universal block copolymer lithography for metals, semiconductors, ceramics, and polymers
A universal block copolymer lithography is developed for a broad spectrum of materials including metals, semiconductors, ceramics, and polymers by combining advanced film deposition techniques with block copolymer lithography. The figure presents a nanopatterned platinum film prepared by applying universal block copolymer lithography.