화학공학소재연구정보센터
Advanced Materials, Vol.20, No.16, 3155-3158, 2008
Dense self-assembly on sparse chemical patterns: Rectifying and multiplying lithographic patterns using block copolymers
A lithography-friendly self-assembly process which multiplies and rectifies an existing resist patterns is demonstrated here. A polymer film (right figure) has assembled at a 14 nm half-pitch on a thin resist pattern at twice the period (left figure). This directed self-assembly process dramatically heals defects and reduces feature size variation of the ill-defined resist patterns.