화학공학소재연구정보센터
Advanced Materials, Vol.21, No.29, 3002-3002, 2009
Ultrahigh-Crystalline-Quality Silicon Pillars Formed by Millimeter-Wave Annealing of Amorphous Silicon on Glass
Silicon pillars are formed by millisecond-long, single-pulse annealing of 110 GHz millimeter-wave radiation incident upon intrinsic amorphous silicon (a-Si) thin films deposited on glass by hot-wire chemical vapor deposition. The image was taken at a sample tilt angle of 52 degrees for a better 3D view.