A superhydrophobic surface was prepared on aluminum substrate. Anodization and low-temperature plasma treatment were used to create micro-nano-structure and subsequently trichlorooctadecyl-silane modified the rough surface. The result shows that the water static contact of the aluminum surface after anodization and modification by trichlorooctadecyl-silane reaches to 152.1 degrees. A rougher surface with some micro-nano-pores and small mastoids along the edges of pores was generated when low-temperature plasma treatment was applied to anodized aluminum film, resulting in water static contact angle up to 157.8 degrees. (C) 2008 Elsevier B.V. All rights reserved.