The low alloy steels were nitrided in the plasma atmosphere generated by using hollow cathode discharge. For comparison, specimens of 40 Cr steel were in two different potential states. One kind is isolated from cathode and anode between them the discharge was created. The other kind is placed on the plate which is connected to the cathode. The nitriding was carried out at different temperatures. The surface morphology, phase of compound layers and microhardness profiles were analyzed. The optical microscopy observation and X-ray diffraction showed that the compound layers were formed in all experiments. The results of the nitriding treatment are weakly dependent on the potentials applied on the specimens. (C) 2008 Elsevier B. V. All rights reserved.