Perfect epitaxial growth of La0.67Ca0.33MnO3 (LCMO) thin film has been achieved on (1 0 0) LaAlO3 (LAO) single crystal substrate by radio frequency sputtering method. X-ray diffraction (XRD) and electron diffraction analysis indicates that La0.67Ca0.33MnO3 film grows epitaxially on LaAlO3 along [1 0 0] direction of the substrate. The resistivity variation with temperature of the film shows a sharp metal to semiconductor transition peak around 253 K, which is close to that of the target. The magnetoresistance (MR) also reveals high quality epitaxy film characteristic at low temperatures and near the metal to semiconductor transition temperature. (C) 2008 Elsevier B. V. All rights reserved.