화학공학소재연구정보센터
Applied Surface Science, Vol.254, No.23, 7921-7924, 2008
Surface modification by vacuum annealing for field emission from heavily phosphorus-doped homoepitaxial (111) diamond
The relationship between field emission properties and C 1s core level shifts of heavily phosphorusdoped homoepitaxial (1 1 1) diamond is investigated as a function of annealing temperature in order to optimize surface carbon bonding confiurations for device applications. A low field emission threshold voltage is observed from surfaces annealed at 800 degrees C for hydrogen-plasma treated surface, while a low field emission threshold voltage of wet-chemical oxidized surface is observed after annealing at 900 degrees C. The C 1s core level by X-ray photoelectron spectroscopy (XPS) showed a shoulder peak at 1 eV below the main peak over 800 and 900 degrees C annealing temperature for hydrogen-plasma treated and wet-chemical oxidized surfaces, respectively. When the shoulder peak intensity is less than 10% of the main peak intensity, lower threshold voltages are observed. This is due to the carbon-reconstruction which gives rise to a small positive electron affinity. By increasing annealing temperature, the shoulder peak ratios also increase, which indicates that a surface graphitization takes place. This leads to higher threshold voltages. (C) 2008 Elsevier B.V. All rights reserved.