Dynamic secondary ion mass spectroscopy (SIMS) analysis of soft materials such as polymer or biomaterial is one of challenging subjects due to the charge up effect brought from the irradiation of a primary ion beam, hampering the collection of secondary ions. Conventional methods against the charging up are the electron beam irradiation for charge compensation and surface coating with metal, normally gold. Those methods require a compromise analytical condition, reducing the primary ion beam current to suppress the range of the charging, which degrading the performances of the SIMS analyses. We have proposed that a thicker conductive layer, capable of delocalizing the charge onto the surface, should be put on a soft insulator sample to avoid charging up. The depth pro. le of the hair sample coated wholly with a polythiophen-based conducting polymer was successfully measured in longer time without any charging up even in the maximum current of the oxygen primary ion beam (O-2(+): 7.5 keV, 400 nA) or using an electron beam compensation system. Thus, the proposed method coating with a conductive organic polymer against the charging issue would be expected as a breakthrough on SIMS analysis. (c) 2008 Elsevier B.V. All rights reserved.