A study on surface oxidation of AISI316L stainless steel surface was performed. Stainless steel was oxidized in air plasma with a high degree of dissociation of oxygen molecules of about 70%. The resultant flux of oxygen atoms to the surface was about 1 x 10(24) m (2) s (1). The oxidation was performed at high temperatures ranging up to 1250 K. The oxidation time was 5 min. After oxidation the surface of the samples was analyzed by different methods including Auger electron depth pro. ling (AES), X-ray photoelectron spectroscopy (XPS), scanning electron spectroscopy (SEM) and X-ray diffraction (XRD). The microstructure and composition of the surface were temperature dependent. In all cases high Cr concentration was observed on the surface after oxidation at a temperature above 600 K. With increasing temperature Mn concentration at the surface increased as well. Below 1000 K the oxide film was uniform, while above 1000 K islands with large spinel particles were observed to appear. (C) 2008 Elsevier B. V. All rights reserved.