Zn-Te bilayer thin. films have been deposited on well-cleaned glass substrate using vacuum thermal evaporation technique under a vacuum of 5 x 10(5) Torr. These bilayer. films have been modified by Swift heavy ion (SHI) irradiation, vacuum thermal annealing (VTA) and rapid thermal annealing (RTA). Characterization of ZnTe bilayer thin. films have been performed by X-ray diffraction, optical reflectance, atomic force microscopy (AFM) and X-ray. fluorescence (XRF) measurements. Irradiated ZnTe bilayer thin. films have been obtained in cubic phase, Optical band gap values have been found in between the range of ZnTe compound. Increased surface roughness has been observed in irradiated. films, compositional analysis has been confirmed by XRF measurements. Crown Copyright (C) 2008 Published by Elsevier B. V. All rights reserved.