Femtosecond laser (180 fs, 775 nm, 1 kHz) surface modification of the nickel-based superalloy C263 is investigated. The laser beam was scanned onto areas on the substrate with macroscopic dimensions using different fluences (F = 0.28-30 J/cm(2)), speeds (upsilon = 1-10 mm/s) and number of overscans (5-90). The evolution of surface morphology, roughness, ablation depth and volume ablation rate with laser micromachining parameters were determined. The surface morphology is characterized by ripples for low average powers while for high average powers the surface becomes porous. (C) 2008 Elsevier B. V. All rights reserved.