< 111 >-oriented Pb(Zr0.6Ti0.4)O-3 thin films were elaborated in the same run by RF multitarget sputtering on Si/SiO2/TiO2/Pt(111) and LaAlO3/Pt(111) substrates. PZT thin films were textured, exhibiting < 111 > fibre texture on silicon substrates whereas epitaxial relationships were found when grown on LaAlO3/Pt(111). On the latter substrate, values of spontaneous polarization and of dielectric permittivity were measured close to that calculated previously along the < 111 > direction of PZT rhombohedral single crystal. On the contrary, spontaneous polarization and dielectric permittivity measured on PZT thin films deposited on platinized silicon were found deviating from calculated values. These different electrical results are attributed to different ferroelectric domain configurations. (C) 2008 Elsevier B.V. All rights reserved.