Applied Surface Science, Vol.255, No.12, 6217-6220, 2009
Study on electron scattering in solid targets using accurate transport cross-sections
The Vicanek and Urbassek theory [M. Vicanek, H. M. Urbassek, Phys. Rev. B 44 (1991) 7234] combined with a Monte Carlo simulation are used to investigate the transport of 0.5-4 keV electrons in solid targets. The cross-sections used to describe the electron transport have been calculated via a new improved version of the approximate analytical expression given by Jablonski [A. Jablonski, Phys. Rev. B 58 (1998) 16470]. Some applications are presented here for the calculation of electron backscattering coefficient in semi-infinite Al and Cu targets. The obtained results accord with success with the experiment and clearly represent an improvement with respect to previous theoretical calculations. (C) 2009 Elsevier B.V. All rights reserved.