화학공학소재연구정보센터
Applied Surface Science, Vol.255, No.19, 8305-8308, 2009
Periodicity and orientation dependence of electrical properties of [(Pb0.90La0.10)Ti0.975O3/PbTiO3](n) (n=1-6) multilayer thin films
The [(Pb0.90La0.10)Ti0.975O3/PbTiO3](n) (PLT/PT)(n) (n = 1-6) multilayer thin films were deposited on the PbOx(1 0 0)/Pt/Ti/SiO2/Si substrates by RF magnetron sputtering method. The layer thickness of PbTiO3 in one periodicity kept unchanged, and the layer thickness of (Pb0.90La0.10) Ti0.975O3 is varied. The electrical properties of the (PLT/PT) n multilayer thin films were investigated as a function of the periodicity (n) and the orientation. The studied results show that the PbOx buffer layer results in the (PLT/PT)(n) films' (1 0 0) orientation, and the (1 0 0)-oriented (PLT/PT)(n) multilayer thin films with n = 2 exhibit better pyroelectric properties and ferroelectric behavior than those of (PLT/PT) n films with other periodicities and orientations. The underlying physical mechanism for the enhanced electrical properties of (PLT/PT) n multilayer thin films was carefully discussed in terms of the periodicities and orientations. (C) 2009 Elsevier B. V. All rights reserved.