TiN, TiC and Ti(C, N) films have been respectively prepared using closed-field unbalanced magnetron sputtering ion plating technology, with graphite target serving as the C supplier in an Ar-N-2 mixture gas. Bonding states and microstructure of the. lms are characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) in combination with transmission electron microscopy (TEM). The friction coefficients are measured by pin-on-disc test and the wear traces of deposited. lms are observed by optical microscope. Results show that the TiN film and Ti(C, N) film exhibit dense columnar structure while the TiC film exhibits a mixed microstructure of main nanocrystallite and little amorphous phases. The Ti(C, N) film has the highest microhardness value and the TiC film has the lowest. Because of small amount of pure carbon with sp(2) bonds existing in the film, the friction coefficients of Ti(C, N) and TiC multilayer. lms are lower than that of TiN film. In addition, the multilayer structure of. lms also contributes visually to decrease of friction coefficients. The TiC film has extremely low friction coefficient while the wear ratio is the highest in all of the. lms. The results also show that the Ti(C, N) film has excellent anti-abrasion property. (C) 2009 Elsevier B.V. All rights reserved.