In the present work, glow discharge oxygen plasma was used to sterilize the Pseudomonas aeruginosa on the polyethylene terephthalate (PET) sheets. In a self-designed plasma reaction equipment, active species (electron, ion, radical, UV light, etc.) were separated effectively, and the discharge area, afterglow area and remote area were plotted out in the plasma field. Before and after plasma treatment the cell morphology was studied by scanning electron microscopy (SEM). The results showed that after treatment of 30 s the germicidal effect is 4.26, 3.84, 2.61, respectively in the three areas on the following conditions: discharge power was 40 W and gas flux was 20 cm(3)/min. SEM results revealed the cell morphology before and after plasma treatment. The walls or cell membrane cracking was testified by determining the content of protein using coomassie light blue technique. The results from electron spin resonance spectroscopy (ESR) and double Langmuir electron probe showed that electron, ion and oxygen free radical played important roles in sterilization in the discharge area, but only oxygen radicals acted to sterilize the bacteria in the afterglow area and the remote area. (C) 2009 Published by Elsevier B.V.