Effect of the deposition temperature (200 and 500 degrees C) and composition of SmxCe1-xO2-x/2 (x = 0, 10.9-15.9 mol%) thin films prepared by electron beam physical vapor deposition (EB-PVD) and Ar+ ion beam assisted deposition (IBAD) combined with EB-PVD on structural characteristics and morphology/microstructure was investigated. The X-ray photoelectron spectroscopy (XPS) of the surface and electron probe microanalysis (EPMA) of the bulk of the film revealed the dominant occurrence of Ce4+ oxidation state, suggesting the presence of CeO2 phase, which was confirmed by X-ray diffraction (XRD). The Ce3+ oxidation states corresponding to Ce2O3 phase were in minority. The XRD and scanning electron microscopy (SEM) showed the polycrystalline columnar structure and a rooftop morphology of the surface. Effects of the preparation conditions (temperature, composition, IBAD) on the lattice parameter, grain size, perfection of the columnar growth and its impact on the surface morphology are analyzed and discussed. (C) 2009 Elsevier B.V. All rights reserved.