Pure anatase is a metastable phase and inclined to (transform) be transformed into rutile structure under heating over than 500 degrees C, which limits its suitability for high-temperature applications. Hitherto much research efforts have been made to increase the stability temperature of anatase structure. However, metallic doping usually introduced metallic oxides into titania at high temperature, and many nonmetallic doping are not competent for increasing the stability temperature of anatase structure up to 900 degrees C. In this study, F-doped anatase TiO2 nanoparticles were conveniently prepared via the alcoholysis of TiCl4 and the as-prepared product shows very high stability temperature up to 1000 degrees C before being transformed into rutile structure phase. On the basis of XPS results of F-doped titania annealed at different temperature, it is learned that the F atoms were anchored on the crystal planes of anatase in favor of decreasing the energy faces of anatase and stabilizing the anatase structure till annealed at 1300 degrees C all the anatase were transformed into rutile phase. (C) 2009 Elsevier B.V. All rights reserved.