Silica glass can be machined by irradiation with laser plasma soft X-rays on nano-and micrometer scale. We have investigated the ablation process of silica glass induced by laser plasma soft X-ray irradiation. We observed ionic and neutral species emitted from silica surfaces after irradiation. Dominant ions and neutrals are O+ and Si+ ions and Si, O, SiO and Si-2 neutrals, respectively. The ions have kinetic energies of 13 and 25 eV, which are much higher than those of particles emitted by evaporation. The energy of laser plasma soft X-rays absorbed to silica glass at a fluence of 1.4 J/cm(2) is estimated to be 380 kJ/cm(3), which is higher than the binding energy of SiO2 of 76 kJ/cm(3). These results suggest that the most of the bonds in silica glass are broken by absorption of laser plasma soft X-rays, that several percent of the atoms are ionized, and that neutral atoms are emitted together with repulsive ions. The process possibly enables us to fabricate nano structures. (C) 2009 Elsevier B. V. All rights reserved.