20 mu m parylene C layer was deposited on silicone film to enhance the oxygen and water barrier properties, deposited at typical rate of 2.0 and 5.6 mu m/h by controlling different deposited pressures. Surface morphology and roughness were observed by atomic force microscopy (AFM), surface morphology images show lower deposited rate that can lead to better quality film. 20 mu m parylene C layer was deposited on silicone encapsulation of high power light emitting diodes (LEDs), the samples were tested by power temperature cycling (PTC) test from -40 to 85 degrees C, 15 min each extreme, and no corrosion, discoloration, cracks was found on the LEDs after the 1000 h PTC reliability test, and PTC test is intended to simulate worst case conditions encountered in typical applications, and parylene C floating membrane structure can stand such high stress and strain. Optical test on white and red LED samples with and without 20 mu m parylene C layer, measurement result shows the optical transmittance more than 95%. 1000 h temperature humidity bias life test (T&HB) is performed for the purpose of evaluating the reliability of LEDs in humid environments, energy-dispersive X-ray (EDX) analysis revealed much lower content of C (carbon) and O (oxygen) on the lead frame of LED with parylene C coating after T&HB test on, and no oxidation was found in the LED package. (C) 2009 Elsevier B. V. All rights reserved.