Pulsed laser deposited mixed hydroxyapatite (HA)/calciumphosphate thin films were prepared at room temperature using KrF laser source with different laser fluence varying between 2.4 J/cm(2) and 29.2 J/cm(2). Samples deposited at 2.4 J/cm(2) were partially amorphous and had rough surfaces with a lot of droplets while higher laser fluences showed higher level of crytallinity and lower roughness of surfaces of obtained samples. Higher laser fluences also decreased ratio Ca/P of as-deposited samples. X-ray photoelectron spectroscopy (XPS) revealed traces of carbonate groups in obtained samples, which were removed after thermal annealing. The decomposition of HA into TCP was observed to start at about 400 degrees C. The formation of new crystalline phase of HA was found after annealing as well. The cracks observed on surface of sample deposited at 29.2 J/cm(2) after annealing indicated that the HA/calcium phosphate films deposited at higher laser energy densities were probably more densed. (C) 2009 Elsevier B. V. All rights reserved.