Applied Surface Science, Vol.256, No.1, 256-260, 2009
Characterisation of Ni and Ni/Ti contact on n-type 4H-SiC
In this work, we report on the structural characterisation of Ni and Ni/Ti bilayer contacts on n-type 4H-SiC. The redistribution of carbon, after annealing, in the Ni/SiC and the Ni/Ti/SiC contacts is particularly studied by RBS at 3.2 MeV, XRD and AES techniques. (C) 2009 Elsevier B. V. All rights reserved.