An analytical solution of the vibration responses of biological specimens using atomic force microscopy (AFM), which often requires operation in a liquid, is developed. In this study, the modal superposition method is employed to analyze the vibration responses of AFM cantilevers in tapping mode (TM) operated in a liquid and in air. The hydrodynamic force exerted by the fluid on AFM cantilevers is approximated by additional mass and hydrodynamic damping. The tip-sample interaction forces were transformed into axial, distributed transversal, and bending loading, and then applied to the end region of the AFM through the tip holder. The effects of transverse stress and bending stress were adopted to solve the dynamic model. With this model, a number of simulations were carried out to investigate the relationship between the transient responses of the cantilever in a liquid and the parameters considered in nanoscale processing. The simulations show that the vibration of AFM cantilevers in a liquid has dramatically different dynamic characteristics from these of that in air. The liquid reduces the magnitude of the transversal response and reduces the cantilever resonances. Moreover, the magnitudes of response become larger with increasing intermolecular distances and smaller with decreasing tip length. The cantilever vibration amplitudes significantly depend on the damping constant and the mass proportionality constant. (C) 2009 Elsevier B.V. All rights reserved.