Systematic studies by atomic force microscopy and X-ray reflectivity of three monolayer Langmuir-Blodgett films of M-Stearate (M = Cd, Zn, Mn) show change in surface morphology and growth mode with change in metal ions in the headgroup. Growth proceeds via Volmer Weber mode in CdSt, Stranski-Krastanov mode in ZnSt and Frank Van der Merwe mode in MnSt, as ascertained from fractal dimensions and out-of-plane density profiles. This is closely related with increase in number of metal ions incorporated per headgroup with change in metal ions in the order Cd, Zn and Mn. A preliminary correlation with metal atomic number is noted. (C) 2009 Elsevier B. V. All rights reserved.